Smart sensors, actuators, and MEMS II (9-11 May 2005, Seville, Spain)Chiao, Jung-Chih; Cané, Carles.SPIE proceedings series. 2005, isbn 0-8194-5831-7, 1Vol, XV-730 p, isbn 0-8194-5831-7Conference Proceedings

Thermoelectric Thin Film Power Generators - Self-sustaining power supply for smart systemsNUMUS, Joachim.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 736205.1-736205.6Conference Paper

Smart sensors, actuators, and MEMS (Maspalomas, 19-21 May 2003)Jung-Chih Chiao; Varadan, Vijay K; Cané, Carles et al.SPIE proceedings series. 2003, isbn 0-8194-4976-8, XXVI, 434 p, isbn 0-8194-4976-8Conference Proceedings

Packaging of MEMS MicrophonesFEIERTAG, Gregor; WINTER, Matthias; LEIDL, Anton et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73620D.1-73620D.8Conference Paper

What happens turning a 250μm thin Piezo-stack sideways?: An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflectionZÄHRINGER, Sandy; SCHWESINGER, Norbert.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73620L.1-73620L.8Conference Paper

Rapid prototyping and structure generation using three-dimensional nanolithography with electron beam induced chemical reactionsKOOPS, Hans W. P.SPIE proceedings series. 2003, pp 393-401, isbn 0-8194-4976-8, 9 p.Conference Paper

Novel measurement and monitoring system for forming processes based on piezoresistive thin film systemsBIEHL, Saskia; STAUFENBIEL, Sebastian; HAUSCHILD, Frank et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73621J.1-73621J.5Conference Paper

High speed simultaneous optical and impedance analysis of single particlesMORGAN, Hywel; HOLMES, David; GREEN, Nicolas et al.SPIE proceedings series. 2005, pp 263-272, isbn 0-8194-5831-7, 1Vol, 10 p.Conference Paper

Actuator design using Electroactive PolymersFERNANDEZ, Diego; MORENO, Luis; BASELGA, Juan et al.SPIE proceedings series. 2005, pp 128-137, isbn 0-8194-5831-7, 1Vol, 10 p.Conference Paper

Smart tong grippers for micro-partsSCHLICK, Jochen; ZUEHLKE, Detlef.SPIE proceedings series. 2003, pp 220-228, isbn 0-8194-4976-8, 9 p.Conference Paper

An envelope model to describe the sensor dynamics of vibratory gyroscopesEGRETZBERGER, Markus; KUGI, Andreas.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73620B.1-73620B.9Conference Paper

Increasing Sensitivity of Vibration Energy HarvesterHADAS, Z; ONDRUSEK, C; SINGULE, V et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 736203.1-736203.8Conference Paper

Smart sensors modeling using VHDL-AMS for micro instruments implementation with a distributed architectureLORENTE, B; BARRACHINA, L; FERRER, C et al.SPIE proceedings series. 2005, pp 86-97, isbn 0-8194-5831-7, 1Vol, 12 p.Conference Paper

Polymer-based MEMS accelerometer with modified organic electronics and thin film transistorVARADAN, Vijay K.SPIE proceedings series. 2003, pp 149-159, isbn 0-8194-4976-8, 11 p.Conference Paper

Smart electrostrictive composite materials for actuatorsYU, N; SOMPHONE, T.SPIE proceedings series. 2003, pp 252-259, isbn 0-8194-4976-8, 8 p.Conference Paper

Constant-Charge Biasing Integrated Circuit for Capacitive RF MEMS switchCHOI, Kyung-Hak; LEE, Jeong-Bong.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73621O.1-73621O.9Conference Paper

Influence of Back Pressure and Plasma Power on Grain Size, Phase Composition and Resistivity of Tantalum Thin FilmsGROSSER, M; SCHMID, U.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 736216.1-736216.8Conference Paper

Micromechanical sensors based on lateral and longitudinal displacement of a cantilever sensing element: A comparative performance studyMATOVIC, Jovan; JAKSIC, Zoran.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73621E.1-73621E.10Conference Paper

Piezoresistive chemical sensors based on hydrogelsGUENTHER, Margarita; GERLACH, Gerald; WALLMERSPERGER, Thomas et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 736218.1-736218.12Conference Paper

Power management circuit for resonant energy harvestersJIRKU, Tomas; STEINBAUER, Miloslav; KLUGE, Matrin et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73621S.1-73621S.12Conference Paper

SAW-grade SiO₂ for advanced microfluidic devicesWINKLER, Andreas; MENZEL, Siegfried; SCHMIDT, Hagen et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73621Q.1-73621Q.10Conference Paper

Ultrasonic Motor Model and Power Analysis for Industrial Mobile ApplicationsTEICHLER, Jens; CHLADNY, Ryan; SCHROLL, Christian et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7362, issn 0277-786X, isbn 978-0-8194-7636-4, 73621G.1-73621G.8Conference Paper

Smart sensors, actuators, and MEMS III (2-4 May 2007, Maspalomas, Gran Canaria, Spain)Becker, Thomas; Cané, Carles; Barker, Nicolas Scott et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, issn 0277-786X, isbn 978-0-8194-6717-1, 1Vol, various pagings, isbn 978-0-8194-6717-1Conference Proceedings

Plasma activated wafer bonding for MEMSDRAGOI, V; FARRENS, S; LINDNER, P et al.SPIE proceedings series. 2005, pp 179-187, isbn 0-8194-5831-7, 1Vol, 9 p.Conference Paper

3D capacitive tactile sensor using DRIE micromachiningCHIEHTANG CHUANG; ROUNGSHUN CHEN.SPIE proceedings series. 2005, pp 719-726, isbn 0-8194-5831-7, 1Vol, 8 p.Conference Paper